Production of a Tunnel Field-Effect Transistor (TFET) for Energy-efficient Nanoelectronics
Ref-Nr: TA-PT 1.2684
Kurzfassung
The described technology concerns a tunnel field-effect transistor (TFET) with superior tunnelling currents.
Hintergrund
The technology, a tunnel field-effect transistor (TFET), features two advantages over conventional TFET devices. First, the tunnel junction is steeper with high doping concentration, leading to a thinner tunnel barrier, and thus higher tunnelling currents. This was achieved by a new process that provides both silicidation and dopant segregation directly in the source region. Second, the tunnelling area with tunnelling parallel to the electric field of the gate is enlarged by means of selective and self-adjusting silicidation. This further increases the tunnelling currents.
Forschungszentrum Jülich has extensive expertise in this field and holds several patents. The technology described above is continuously being developed further. The Peter Grünberg Institute (PGI-9) – Semiconductor Nanoelectronics – already cooperates with numerous national and international companies and scientific partners. Forschungszentrum Jülich focuses on energy efficient devices, finding solutions to reduce the power consumption of integrated circuits. We are continuously seeking for cooperation partners and/or licensees in this and adjacent areas of research and applications.
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Problemstellung
The invention addresses increasing energy consumption issues related to the continuous reduction of transistor sizes and increasing packing density of transistors per chip.
Lösung
The TFET combines a tunnel junction parallel to the electric field of the gate with a material having a narrower band gap, featuring an enlarged tunnel region below the gate. The production process comprises selective, self-adjusting silicidation and additionally dopant segregation. These advantages allow a production of the tunnel junction for higher tunnelling probabilities. Reproducibility of the process was proven, showing a great potential for ultra-low power applications of TFETs.
Anwendungsbereiche
In the potential fields of application Green Nanoelectronics and Internet of Things (IoT), more energy-efficient transistors are essential for the development of higher-performance mobile devices and computers.
Service
If you have questions about the technology please refer to:
Peter Grünberg Institute (IEK-9)
Semiconductor Nanoelectronics
Prof. Dr. Detlev Grützmacher
Phone: +49 (0) 2461-61 2340
E-Mail: d.gruetzmacher@fz-juelich.de
Prof. Dr. Qing-Tai Zhao
Phone: +49 (0) 2461-61 4673
E-Mail: q.zhao@fz-juelich.de
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Forschungszentrum Jülich GmbH
Jörg Bohnemann
+49 2461/61-5711
j.bohnemann@fz-juelich.de
www.fz-juelich.de
Adresse
Wilhelm-Johnen-Straße
52425 Jülich
Entwicklungsstand
Prototyp
Patentsituation
- DE 102014018382.3 erteilt
- WO /2016/095885 anhängig
- EP /DE2015/000531 erteilt
- US US10153343B2 erteilt
Stichworte
Green Nanoelectronics, Tunnel Field-Effect Transistor, TFET, Tunnel Barrier, Tunnel Junction, Internet of ThingsAngebot Anbieter-Website